Secondary ion mass spectrometry: Difference between revisions

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|ref=A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).
|ref=A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).
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==Gallery==
{{gallery|file=File:Ion surface interactions.gif|caption=Overview of various ion-surface interactions. (1)-incoming ion; (2)-scattering; (3)-neutralization and scattering; (4)-sputtering or recoiling; (5)-electron emission; (6)-photon emission; (7)-adsorption; (8)-displacement, e.g. from sputtering event.}}
[[Category:Ionization]]
[[Category:Ionization]]

Revision as of 13:58, 5 July 2025

IUPAC RECOMMENDATIONS 2013
Secondary ion mass spectrometry
Technique in which a focused beam of primary ions produces secondary ions by sputtering from a solid surface. The secondary ions are analyzed by mass spectrometry.
Related Term(s): dynamic secondary ion mass spectrometry (DSIMS)
Reference(s):

A. Benninghoven, B. Hagenhoff, E. Niehuis. Anal. Chem. 65, 630A (1993).

From Definitions of Terms Relating to Mass Spectrometry (IUPAC Recommendations 2013); DOI: 10.1351/PAC-REC-06-04-06 © IUPAC 2013.

Index of Recommended Terms

 




Gallery

Overview of various ion-surface interactions. (1)-incoming ion; (2)-scattering; (3)-neutralization and scattering; (4)-sputtering or recoiling; (5)-electron emission; (6)-photon emission; (7)-adsorption; (8)-displacement, e.g. from sputtering event.